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Cymer Project Grouping 2

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  • Architect: DGA

Project Details

Cymer Project Grouping #2 consisted of 20,000sf complete remodel of Office, Lab, and Warehouse space to provide a Class 10,000 clean room Lab for EUV Vessel Assembly and Testing. The project scope specifically included the substantial upgrade of the MEP Facilities Infrastructure along with high end finishes to provide a clean work space. Additional Mechanical upgrades of (2) Air Handling Units increasing filtered supply air volume to the space by 40,000 CFM, this includes 124 new Fan Powered HEPA Units to achieve Class 10,000 Cleanroom Rating. A complex network of Chilled Water, Processed Water, Processed Gases, and Processed Exhaust were added to provide the end user with required utilities and future flexibility. The electrical power upgrade portion included (2) 3000 KVA Transformers for power distribution along 250’ of 4000 and 2000 Amp Busway. The building was structurally modified for upgrades required to install (2) 8 Ton Cleanroom Cranes as well as upgraded Building Fire Ratings with application of Intumescent Paint throughout the project footprint. Interior construction comprised of custom cleanroom partitions and integrated clean rated high-speed rollup doors, access controls, and cleanroom rated finishes

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